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Damascene benchmark of Ru, Co and Cu in scaled dimensions

dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorHeylen, Nancy
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorCiofi, Ivan
dc.contributor.authorDecoster, Stefan
dc.contributor.authorVega Gonzalez, Victor
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorStruyf, Herbert
dc.contributor.authorCroes, Kristof
dc.contributor.authorWilson, Chris
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-26T06:44:51Z
dc.date.available2021-10-26T06:44:51Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32042
dc.sourceIIOimport
dc.titleDamascene benchmark of Ru, Co and Cu in scaled dimensions
dc.typeProceedings paper
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorDecoster, Stefan
dc.contributor.imecauthorVega Gonzalez, Victor
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecDecoster, Stefan::0000-0003-1162-9288
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage172
dc.source.endpage174
dc.source.conferenceIEEE International Interconnect Technology Conference - IITC
dc.source.conferencedate4/06/2018
dc.source.conferencelocationSanta Clara, CA USA
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8430407/
imec.availabilityPublished - open access


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