Properties of p-n diodes made in polysilicon layers with intermediate grain size

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Authors
Beaucarne, Guy; Poortmans, Jef; Caymax, Matty; Nijs, Johan; Mertens, Robert
Journal
Diffusion and Defect Data. Part B: Solid State Phenomena
Volume
67-68
Title
Properties of p-n diodes made in polysilicon layers with intermediate grain size
Publication type
Journal article
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