Multi-trigger resist patterning with ASML NXE3300 EUV scanner

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Authors
Vesters, Yannick; McClelland, Alexandra; De Simone, Danilo; Popescu, Carmen; Dawson, Guy; Roth, John; Theis, Wolfgang; Vandenberghe, Geert; Robinson, Alex P. G.
Conference
Extreme Ultraviolet (EUV) Lithography IX
Title
Multi-trigger resist patterning with ASML NXE3300 EUV scanner
Publication type
Proceedings paper
Embargo date
9999-12-31
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