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Self-aligned block and fully self-aligned via for iN5 metal 2 self-aligned quadruple patterning
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1 since deposited on 2021-10-26
Acq. date: 2025-10-24
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1902 since deposited on 2021-10-26
Acq. date: 2025-10-24
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1 since deposited on 2021-10-26
Acq. date: 2025-10-24
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1902 since deposited on 2021-10-26
Acq. date: 2025-10-24
Citations