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Self-aligned block and fully self-aligned via for iN5 metal 2 self-aligned quadruple patterning
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1 since deposited on 2021-10-26
Acq. date: 2026-01-07
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1907 since deposited on 2021-10-26
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Acq. date: 2026-01-07
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1 since deposited on 2021-10-26
Acq. date: 2026-01-07
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1907 since deposited on 2021-10-26
4last month
Acq. date: 2026-01-07
Citations