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A progress report on DSA of high-chi silicon containing block co-polymers

dc.contributor.authorWillson, C. Grant
dc.contributor.authorJanes, Dustin
dc.contributor.authorIto, Natsuko
dc.contributor.authorBlachut, Gregory
dc.contributor.authorSirard, Stephen
dc.contributor.authorSomeya, Yasunobu
dc.contributor.authorDoise, Jan
dc.contributor.authorMizuochi, Ryuta
dc.contributor.authorLane, Austin
dc.contributor.authorVandenberghe, Geert
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorYang, XiaoMin
dc.contributor.authorEllison, Christopher
dc.date.accessioned2021-10-26T09:26:24Z
dc.date.available2021-10-26T09:26:24Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32269
dc.sourceIIOimport
dc.titleA progress report on DSA of high-chi silicon containing block co-polymers
dc.typeProceedings paper
dc.contributor.imecauthorDoise, Jan
dc.contributor.imecauthorVandenberghe, Geert
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.source.peerreviewyes
dc.source.beginpage105860O
dc.source.conferenceAdvances in Patterning Materials and Processes XXXV
dc.source.conferencedate25/02/2018
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttps://doi.org/10.1117/12.2299966
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 10586


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