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New insights into metal drift induced failure in MOL and BEOL
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Authors
Wu, Chen
;
Varela Pedreira, Olalla
;
Lesniewska, Alicja
;
Li, Yunlong
;
Ciofi, Ivan
;
Tokei, Zsolt
;
Croes, Kristof
Conference
IEEE International Reliability Physics Symposium - IRPS
Title
New insights into metal drift induced failure in MOL and BEOL
Publication type
Proceedings paper
Embargo date
9999-12-31
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