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Improved PBTI reliability in junction-less nFETs fabricated at low thermal budget for 3D sequential integration

dc.contributor.authorWu, Zhicheng
dc.contributor.authorFranco, Jacopo
dc.contributor.authorVandooren, Anne
dc.contributor.authorKaczer, Ben
dc.contributor.authorRoussel, Philippe
dc.contributor.authorRzepa, Gerhard
dc.contributor.authorLinten, Dimitri
dc.contributor.authorGroeseneken, Guido
dc.date.accessioned2021-10-26T09:46:29Z
dc.date.available2021-10-26T09:46:29Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32296
dc.sourceIIOimport
dc.titleImproved PBTI reliability in junction-less nFETs fabricated at low thermal budget for 3D sequential integration
dc.typeProceedings paper
dc.contributor.imecauthorWu, Zhicheng
dc.contributor.imecauthorFranco, Jacopo
dc.contributor.imecauthorVandooren, Anne
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorLinten, Dimitri
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecFranco, Jacopo::0000-0002-7382-8605
dc.contributor.orcidimecVandooren, Anne::0000-0002-2412-0176
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.contributor.orcidimecLinten, Dimitri::0000-0001-8434-1838
dc.contributor.orcidimecGroeseneken, Guido::0000-0003-3763-2098
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage5.2
dc.source.conferenceInternational Integrated Reliability Workshop - IIRW 2018
dc.source.conferencedate7/10/2018
dc.source.conferencelocationFallen Leaf Lake USA
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8727075
imec.availabilityPublished - open access


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