Authors

Wu, Zhicheng; Franco, Jacopo; Vandooren, Anne; Kaczer, Ben; Roussel, Philippe; Rzepa, Gerhard; Linten, Dimitri; Groeseneken, Guido

Conference

International Integrated Reliability Workshop - IIRW 2018

Title

Improved PBTI reliability in junction-less nFETs fabricated at low thermal budget for 3D sequential integration

Publication type

Proceedings paper

Embargo date

9999-12-31