Publication:
Impact of ALD TiN capping layer on interface trap and channel hot carrier reliability of HKMG nMOSFETs
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1887 since deposited on 2021-10-26
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Acq. date: 2025-10-25
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Views
1887 since deposited on 2021-10-26
408item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations