Authors

Beyne, Sofie; Varela Pedreira, Olalla; De Wolf, Ingrid; Tokei, Zsolt; Croes, Kristof

Conference

IEEE International Reliability Physics Symposium (IRPS)

Title

Low-frequency noise measurements to characterize Cu-electromigration down to 44nm metal pitch

Publication type

Proceedings paper

Embargo date

9999-12-31