Authors

Beyne, Sofie; Varela Pedreira, Olalla; Oprins, Herman; De Wolf, Ingrid; Tokei, Zsolt; Croes, Kristof

Conference

IEEE International Interconnect Technology Conference (IITC 2019) and Materials for Advanced Metallization Conference (MAM 2019)

Title

Electromigration activation energies in ruthenium interconnects

Publication type

Proceedings paper