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Electromigration activation energies in ruthenium interconnects

dc.contributor.authorBeyne, Sofie
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorOprins, Herman
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorTokei, Zsolt
dc.contributor.authorCroes, Kristof
dc.date.accessioned2021-10-27T07:34:29Z
dc.date.available2021-10-27T07:34:29Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32540
dc.sourceIIOimport
dc.titleElectromigration activation energies in ruthenium interconnects
dc.typeProceedings paper
dc.contributor.imecauthorBeyne, Sofie
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorOprins, Herman
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorCroes, Kristof
dc.contributor.orcidimecOprins, Herman::0000-0003-0680-4969
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.source.peerreviewyes
dc.source.beginpage11.4
dc.source.conferenceIEEE International Interconnect Technology Conference (IITC 2019) and Materials for Advanced Metallization Conference (MAM 2019)
dc.source.conferencedate6/03/2019
dc.source.conferencelocationBrussels Belgium
dc.identifier.urlhttps://iitc-conference.org/2019-iitc-mam-program/
imec.availabilityPublished - imec


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