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Variability sources in nanoscale bulk FinFETs and TiTaN- a promising low variability WFM for 7/5nm CMOS nodes
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Authors
Bhoir, Mandar S.
;
Chiarella, Thomas
;
Ragnarsson, Lars-Ake
;
Mitard, Jerome
;
Horiguchi, Naoto
;
Mohapatra, Nihar R.
Conference
65th IEEE International Electron Devices Meeting - IEDM
Title
Variability sources in nanoscale bulk FinFETs and TiTaN- a promising low variability WFM for 7/5nm CMOS nodes
Publication type
Proceedings paper
Embargo date
9999-12-31
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