Authors

Boullart, Werner; Mannaert, Geert; Baklanov, Mikhaïl; Shamiryam, D.; Vanhaelemeersch, Serge

Conference

Mattson Technical Seminar, 2nd Edition; 30 September 1999;

Title

ICP and ICPsm process development, a) dry strip only, b) low temperature SiC oxidation removal

Publication type

Oral presentation