dc.contributor.author | Boullart, Werner | |
dc.contributor.author | Mannaert, Geert | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.contributor.author | Shamiryam, D. | |
dc.contributor.author | Vanhaelemeersch, Serge | |
dc.date.accessioned | 2021-10-06T10:44:55Z | |
dc.date.available | 2021-10-06T10:44:55Z | |
dc.date.issued | 1999 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3263 | |
dc.source | IIOimport | |
dc.title | ICP and ICPsm process development, a) dry strip only, b) low temperature SiC oxidation removal | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Boullart, Werner | |
dc.contributor.imecauthor | Mannaert, Geert | |
dc.contributor.imecauthor | Vanhaelemeersch, Serge | |
dc.contributor.orcidimec | Boullart, Werner::0000-0001-7614-2097 | |
dc.contributor.orcidimec | Vanhaelemeersch, Serge::0000-0003-2102-7395 | |
dc.source.peerreview | no | |
dc.source.conference | Mattson Technical Seminar, 2nd Edition; 30 September 1999; | |
imec.availability | Published - imec | |