Characterization of ultra thin layers by Rutherford backscattering spectrometry

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Authors
Brijs, Bert; Deleu, Jeroen; Conard, Thierry; Li, H.; Loo, Roger; Caymax, Matty; Nakajima, K.; Kimura, K.; Vandervorst, Wilfried
Conference
Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes
Title
Characterization of ultra thin layers by Rutherford backscattering spectrometry
Publication type
Proceedings paper
Embargo date
9999-12-31
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