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Characterization of ultra thin layers by Rutherford backscattering spectrometry

dc.contributor.authorBrijs, Bert
dc.contributor.authorDeleu, Jeroen
dc.contributor.authorConard, Thierry
dc.contributor.authorLi, H.
dc.contributor.authorLoo, Roger
dc.contributor.authorCaymax, Matty
dc.contributor.authorNakajima, K.
dc.contributor.authorKimura, K.
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-06T10:45:42Z
dc.date.available2021-10-06T10:45:42Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3272
dc.sourceIIOimport
dc.titleCharacterization of ultra thin layers by Rutherford backscattering spectrometry
dc.typeProceedings paper
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage160
dc.source.endpage169
dc.source.conferenceAnalytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes
dc.source.conferencedate16/09/1999
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - open access
imec.internalnotesElectrochemical Society Proceedings; Vol. PV 99-16


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