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Depth profiling of sub-100 nm structures: New dimensions in data understanding through the combination of ToF-SIMS with in-situ AFM
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Authors
Conard, Thierry
;
Spampinato, Valentina
;
Franquet, Alexis
;
Vandervorst, Wilfried
;
van der Heide, Paul
Conference
22nd International Conference on Secondary Ion Mass Spectrometry - SIMS-22
Title
Depth profiling of sub-100 nm structures: New dimensions in data understanding through the combination of ToF-SIMS with in-situ AFM
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