dc.contributor.author | Conard, Thierry | |
dc.contributor.author | Spampinato, Valentina | |
dc.contributor.author | Franquet, Alexis | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | van der Heide, Paul | |
dc.date.accessioned | 2021-10-27T08:09:05Z | |
dc.date.available | 2021-10-27T08:09:05Z | |
dc.date.issued | 2019 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/32736 | |
dc.source | IIOimport | |
dc.title | Depth profiling of sub-100 nm structures: New dimensions in data understanding through the combination of ToF-SIMS with in-situ AFM | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Conard, Thierry | |
dc.contributor.imecauthor | Spampinato, Valentina | |
dc.contributor.imecauthor | Franquet, Alexis | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.imecauthor | van der Heide, Paul | |
dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
dc.contributor.orcidimec | Spampinato, Valentina::0000-0003-3225-6740 | |
dc.contributor.orcidimec | Franquet, Alexis::0000-0002-7371-8852 | |
dc.contributor.orcidimec | van der Heide, Paul::0000-0001-6292-0329 | |
dc.source.peerreview | yes | |
dc.source.conference | 22nd International Conference on Secondary Ion Mass Spectrometry - SIMS-22 | |
dc.source.conferencedate | 20/10/2019 | |
dc.source.conferencelocation | Kyoto Japan | |
imec.availability | Published - imec | |