Dry cleaning of WS2 using reducing downstream plasma

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Authors
de Marneffe, Jean-Francois; Marinov, Daniil; Zhang, Jianran; With, Patrick; Smets, Quentin; Arutchelvan, Goutham; Voronina, E.; Mankelevitch, Yuri; Rakhimova, Tatyana; Bal, Kristof; Asselberghs, Inge; De Gendt, Stefan
Conference
PESM 2019
Title
Dry cleaning of WS2 using reducing downstream plasma
Publication type
Meeting abstract
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