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Dry cleaning of WS2 using reducing downstream plasma

dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorMarinov, Daniil
dc.contributor.authorZhang, Jianran
dc.contributor.authorWith, Patrick
dc.contributor.authorSmets, Quentin
dc.contributor.authorArutchelvan, Goutham
dc.contributor.authorVoronina, E.
dc.contributor.authorMankelevitch, Yuri
dc.contributor.authorRakhimova, Tatyana
dc.contributor.authorBal, Kristof
dc.contributor.authorAsselberghs, Inge
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-27T08:25:35Z
dc.date.available2021-10-27T08:25:35Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32805
dc.sourceIIOimport
dc.titleDry cleaning of WS2 using reducing downstream plasma
dc.typeMeeting abstract
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorSmets, Quentin
dc.contributor.imecauthorArutchelvan, Goutham
dc.contributor.imecauthorAsselberghs, Inge
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecSmets, Quentin::0000-0002-2356-5915
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewyes
dc.source.conferencePESM 2019
dc.source.conferencedate20/05/2019
dc.source.conferencelocationGrenoble FRance
imec.availabilityPublished - imec


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