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Electrical evaluation of the EPI/substrate interface quality after different in-situ and ex-situ low-temperature pre-epi cleaning methods
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1911 since deposited on 2021-10-06
2last month
Acq. date: 2026-01-11
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Metrics
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1911 since deposited on 2021-10-06
2last month
Acq. date: 2026-01-11
Citations