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Electrical evaluation of the EPI/substrate interface quality after different in-situ and ex-situ low-temperature pre-epi cleaning methods
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1913 since deposited on 2021-10-06
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Acq. date: 2026-03-17
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1913 since deposited on 2021-10-06
2last month
2last week
Acq. date: 2026-03-17
Citations