dc.contributor.author | Founta, Valeria | |
dc.contributor.author | Witters, Thomas | |
dc.contributor.author | Mertens, Sofie | |
dc.contributor.author | Vanstreels, Kris | |
dc.contributor.author | Meersschaut, Johan | |
dc.contributor.author | Van Marcke, Patricia | |
dc.contributor.author | Korytov, Maxim | |
dc.contributor.author | Franquet, Alexis | |
dc.contributor.author | Wilson, Chris | |
dc.contributor.author | Tokei, Zsolt | |
dc.contributor.author | Van Elshocht, Sven | |
dc.contributor.author | Adelmann, Christoph | |
dc.date.accessioned | 2021-10-27T09:17:13Z | |
dc.date.available | 2021-10-27T09:17:13Z | |
dc.date.issued | 2019 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/32974 | |
dc.source | IIOimport | |
dc.title | Molybdenum as an Alternative Metal: Thin Film Properties | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Founta, Valeria | |
dc.contributor.imecauthor | Witters, Thomas | |
dc.contributor.imecauthor | Mertens, Sofie | |
dc.contributor.imecauthor | Vanstreels, Kris | |
dc.contributor.imecauthor | Meersschaut, Johan | |
dc.contributor.imecauthor | Van Marcke, Patricia | |
dc.contributor.imecauthor | Korytov, Maxim | |
dc.contributor.imecauthor | Franquet, Alexis | |
dc.contributor.imecauthor | Wilson, Chris | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.imecauthor | Van Elshocht, Sven | |
dc.contributor.imecauthor | Adelmann, Christoph | |
dc.contributor.orcidimec | Mertens, Sofie::0000-0002-1482-6730 | |
dc.contributor.orcidimec | Vanstreels, Kris::0000-0002-4420-0966 | |
dc.contributor.orcidimec | Meersschaut, Johan::0000-0003-2467-1784 | |
dc.contributor.orcidimec | Franquet, Alexis::0000-0002-7371-8852 | |
dc.contributor.orcidimec | Van Elshocht, Sven::0000-0002-6512-1909 | |
dc.contributor.orcidimec | Adelmann, Christoph::0000-0002-4831-3159 | |
dc.source.peerreview | yes | |
dc.source.conference | IEEE International Interconnect Technology Conference (IITC 2019) | |
dc.source.conferencedate | 3/06/2019 | |
dc.source.conferencelocation | Brussels Belgium | |
imec.availability | Published - imec | |
imec.internalnotes | Proceedings still to appear in 2020 online | |