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Hybrid SIMS: How the orbitrap mass analyzer can improve the self-focusing SIMS concept for advanced semiconductor structures

dc.contributor.authorFranquet, Alexis
dc.contributor.authorSpampinato, Valentina
dc.contributor.authorKayser, Sven
dc.contributor.authorHavelund, Rasmus
dc.contributor.authorGilmore, Ian
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorvan der Heide, Paul
dc.date.accessioned2021-10-27T09:20:23Z
dc.date.available2021-10-27T09:20:23Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32983
dc.sourceIIOimport
dc.titleHybrid SIMS: How the orbitrap mass analyzer can improve the self-focusing SIMS concept for advanced semiconductor structures
dc.typeProceedings paper
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorSpampinato, Valentina
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorvan der Heide, Paul
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecSpampinato, Valentina::0000-0003-3225-6740
dc.contributor.orcidimecvan der Heide, Paul::0000-0001-6292-0329
dc.source.peerreviewyes
dc.source.conferenceFCMN 2019 - International Conference on Frontiers of Characterization and Metrology for Nanoelectronics
dc.source.conferencedate2/04/2019
dc.source.conferencelocationMonterey, CA USA
imec.availabilityPublished - imec


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