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Low-temperature IGZO technology on transparent plastic foil by atmospheric spatial atomic layer deposition
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Authors
Frijter, Corne
;
Verbeek, Roy
;
de Haas, Gerard
;
Ke, Tung Huei
;
Vandenplas, Erwin
;
Ameys, Marc
;
van der Steen, Jan-Laurens
;
Gelinck, Gerwin
;
Meulenkamp, Eric
;
Poodt, Paul
;
Kronemeijer, Auke
;
Katsouras, Ilias
Conference
International Display Workshops - IDW 2019
Title
Low-temperature IGZO technology on transparent plastic foil by atmospheric spatial atomic layer deposition
Publication type
Proceedings paper
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