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Low-temperature IGZO technology on transparent plastic foil by atmospheric spatial atomic layer deposition

dc.contributor.authorFrijter, Corne
dc.contributor.authorVerbeek, Roy
dc.contributor.authorde Haas, Gerard
dc.contributor.authorKe, Tung Huei
dc.contributor.authorVandenplas, Erwin
dc.contributor.authorAmeys, Marc
dc.contributor.authorvan der Steen, Jan-Laurens
dc.contributor.authorGelinck, Gerwin
dc.contributor.authorMeulenkamp, Eric
dc.contributor.authorPoodt, Paul
dc.contributor.authorKronemeijer, Auke
dc.contributor.authorKatsouras, Ilias
dc.date.accessioned2021-10-27T09:23:07Z
dc.date.available2021-10-27T09:23:07Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32991
dc.sourceIIOimport
dc.titleLow-temperature IGZO technology on transparent plastic foil by atmospheric spatial atomic layer deposition
dc.typeProceedings paper
dc.contributor.imecauthorVerbeek, Roy
dc.contributor.imecauthorKe, Tung Huei
dc.contributor.imecauthorVandenplas, Erwin
dc.contributor.imecauthorAmeys, Marc
dc.contributor.imecauthorvan der Steen, Jan-Laurens
dc.contributor.imecauthorKronemeijer, Auke
dc.contributor.imecauthorKatsouras, Ilias
dc.contributor.orcidimecKe, Tung Huei::0000-0001-8381-4998
dc.contributor.orcidimecAmeys, Marc::0000-0001-7140-2101
dc.source.peerreviewyes
dc.source.beginpageAMD7-4L
dc.source.conferenceInternational Display Workshops - IDW 2019
dc.source.conferencedate27/11/2019
dc.source.conferencelocationSapporo Japan
dc.identifier.urlhttps://doi.org/10.36463/idw.2019.0489
imec.availabilityPublished - imec


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