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Characterization of Impact of Vertical Stress on FinFETs

dc.contributor.authorFuruhashi, Takahisa
dc.contributor.authorHaneda, Masaki
dc.contributor.authorSasaki, Toru
dc.contributor.authorKagawa, Yoshihisa
dc.contributor.authorOoka, Yutaka
dc.contributor.authorHirano, Tomoyuki
dc.contributor.authorOhno, Keiichi
dc.contributor.authorIwamoto, Hayato
dc.contributor.authorSaito, Masaki
dc.contributor.authorLiu, Yefan
dc.contributor.authorHiblot, Gaspard
dc.contributor.authorVanstreels, Kris
dc.contributor.authorGonzalez, Mario
dc.contributor.authorVelenis, Dimitrios
dc.contributor.authorBeyer, Gerald
dc.contributor.authorVan der Plas, Geert
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorBeyne, Eric
dc.date.accessioned2021-10-27T09:25:25Z
dc.date.available2021-10-27T09:25:25Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32997
dc.sourceIIOimport
dc.titleCharacterization of Impact of Vertical Stress on FinFETs
dc.typeMeeting abstract
dc.contributor.imecauthorFuruhashi, Takahisa
dc.contributor.imecauthorHaneda, Masaki
dc.contributor.imecauthorSasaki, Toru
dc.contributor.imecauthorLiu, Yefan
dc.contributor.imecauthorHiblot, Gaspard
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorGonzalez, Mario
dc.contributor.imecauthorVelenis, Dimitrios
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorVan der Plas, Geert
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecHiblot, Gaspard::0000-0002-3869-965X
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecVan der Plas, Geert::0000-0002-4975-6672
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.source.peerreviewyes
dc.source.conference2019 22nd European Microelectronics and Packaging Conference & Exhibition (EMPC)
dc.source.conferencedate16/09/2019
dc.source.conferencelocationPisa Italy
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8951822
imec.availabilityPublished - imec


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