Authors

Groven, Benjamin; Claes, Dieter; Nalin Mehta, Ankit; Bender, Hugo; Vandervorst, Wilfried; Heyns, Marc; Caymax, Matty; Radu, Iuliana; Delabie, Annelies

ISSN

0021-9606

Issue

10

Journal

Journal of Chemical Physics

Volume

150

Title

Chemical vapor deposition of monolayer-thin WS2 crystals from the WF6 and H2S precursors at low temperature

Publication type

Journal article