TSV-assisted hybrid FinFET CMOS - Silicon photonics technology for high density optical I/O

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Authors
Guermandi, Davide; Bogaerts, Lieve; Rakowski, Michal; Ban, Yoojin; De Heyn, Peter; Pantano, Nicolas; Bex, Pieter; De Coster, Jeroen; He, Junwen; Phommahaxay, Alain; Balakrishnan, Sadhishkumar; Demeurisse, Caroline; Bertheau, Julien; Rebibis, Kenneth June; Nolmans, Philip; Sun, Xiao; Srinivasan, Ashwyn; Van Huylenbroeck, Stefaan; Lardenois, Sebastien; Miller, Andy; Absil, Philippe; Verheyen, Peter; Velenis, Dimitrios; Pantouvaki, Marianna; Van Campenhout, Joris
Conference
45th European Conference on Optical Communication - ECOC
Title
TSV-assisted hybrid FinFET CMOS - Silicon photonics technology for high density optical I/O
Publication type
Proceedings paper
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