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Modelling of display-compatible piezoelectric micromachined ultrasonic transducers for haptic feedback

dc.contributor.authorHalbach, Alexandre
dc.contributor.authorGijsenbergh, Pieter
dc.contributor.authorJeong, Yongbin
dc.contributor.authorBillen, Margo
dc.contributor.authorChare, Christopher
dc.contributor.authorGao, Hang
dc.contributor.authorBrondani Torri, Guilherme
dc.contributor.authorCheyns, David
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorRochus, Veronique
dc.date.accessioned2021-10-27T09:59:27Z
dc.date.available2021-10-27T09:59:27Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33086
dc.sourceIIOimport
dc.titleModelling of display-compatible piezoelectric micromachined ultrasonic transducers for haptic feedback
dc.typeProceedings paper
dc.contributor.imecauthorHalbach, Alexandre
dc.contributor.imecauthorGijsenbergh, Pieter
dc.contributor.imecauthorJeong, Yongbin
dc.contributor.imecauthorBillen, Margo
dc.contributor.imecauthorChare, Christopher
dc.contributor.imecauthorGao, Hang
dc.contributor.imecauthorBrondani Torri, Guilherme
dc.contributor.imecauthorCheyns, David
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorRochus, Veronique
dc.contributor.orcidimecGijsenbergh, Pieter::0000-0003-0135-6968
dc.contributor.orcidimecBillen, Margo::0000-0002-0189-7388
dc.contributor.orcidimecBrondani Torri, Guilherme::0000-0002-5450-658X
dc.contributor.orcidimecCheyns, David::0000-0002-1327-8752
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage6
dc.source.conference20th Int. Conf. on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems
dc.source.conferencedate25/03/2019
dc.source.conferencelocationHannover Germany
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8724526
imec.availabilityPublished - open access


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