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XPS study of the cleaning efficiency by ozone processes of protective films formed by reactive ion etching of Co and Ti silicides
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2015 since deposited on 2021-10-06
1last month
Acq. date: 2025-12-16
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Metrics
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2015 since deposited on 2021-10-06
1last month
Acq. date: 2025-12-16
Citations