Authors

Helin, Philippe; Firrincieli, Andrea; Ray Chaudhuri, Ashesh; Pham, Nga; Lenci, Silvia; Mannarino, Manuel; Osman, Haris

Conference

24th OptoElectronics and Communications Conference

Title

A versatile LPCVD silicon nitride platform for heterogenous photonic circuits: Ultra tight thickness control and low propagation loss

Publication type

Proceedings paper

Embargo date

9999-12-31