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A versatile LPCVD silicon nitride platform for heterogenous photonic circuits: Ultra tight thickness control and low propagation loss

dc.contributor.authorHelin, Philippe
dc.contributor.authorFirrincieli, Andrea
dc.contributor.authorRay Chaudhuri, Ashesh
dc.contributor.authorPham, Nga
dc.contributor.authorLenci, Silvia
dc.contributor.authorMannarino, Manuel
dc.contributor.authorOsman, Haris
dc.date.accessioned2021-10-27T10:12:17Z
dc.date.available2021-10-27T10:12:17Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33119
dc.sourceIIOimport
dc.titleA versatile LPCVD silicon nitride platform for heterogenous photonic circuits: Ultra tight thickness control and low propagation loss
dc.typeProceedings paper
dc.contributor.imecauthorHelin, Philippe
dc.contributor.imecauthorFirrincieli, Andrea
dc.contributor.imecauthorRay Chaudhuri, Ashesh
dc.contributor.imecauthorPham, Nga
dc.contributor.imecauthorLenci, Silvia
dc.contributor.imecauthorMannarino, Manuel
dc.contributor.imecauthorOsman, Haris
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageME1-2
dc.source.conference24th OptoElectronics and Communications Conference
dc.source.conferencedate7/07/2019
dc.source.conferencelocationFukuoka Japan
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8818059
imec.availabilityPublished - open access


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