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Vapor phase thiol self-assembled monolayers enabling area-selective deposition

dc.contributor.authorHerregods, Sebastiaan
dc.contributor.authorDelande, Tinne
dc.contributor.authorPasquali, Mattia
dc.contributor.authorTokei, Zsolt
dc.contributor.authorStruyf, Herbert
dc.contributor.authorArmini, Silvia
dc.date.accessioned2021-10-27T10:17:47Z
dc.date.available2021-10-27T10:17:47Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33133
dc.sourceIIOimport
dc.titleVapor phase thiol self-assembled monolayers enabling area-selective deposition
dc.typeMeeting abstract
dc.contributor.imecauthorHerregods, Sebastiaan
dc.contributor.imecauthorDelande, Tinne
dc.contributor.imecauthorPasquali, Mattia
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorArmini, Silvia
dc.contributor.orcidimecPasquali, Mattia::0000-0002-1309-1082
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.source.peerreviewyes
dc.source.beginpage4.1
dc.source.conferenceIEEE International Interconnect Technology Conference (IITC 2019) and Materials for Advanced Metallization Conference (MAM 2019)
dc.source.conferencedate3/06/2019
dc.source.conferencelocationBrussels Belgium
dc.identifier.urlhttps://iitc-conference.org/2019-iitc-mam-program/
imec.availabilityPublished - imec


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