Authors

Hiblot, Gaspard; Arimura, Hiroaki; Witters, Liesbeth; Chiu, Eddie; Liu, Yefan; Mitard, Jerome; Horiguchi, Naoto; Collaert, Nadine; Van der Plas, Geert

ISSN

1530-4388

Issue

2

Journal

IEEE Transactions on Device and Materials Reliability

Volume

19

Title

Observation of plasma-induced damage in bulk germanium p-type FinFET devices and curing in high-pressure anneal

Publication type

Journal article