Publication:

Observation of plasma-induced damage in bulk germanium p-type FinFET devices and curing in high-pressure anneal

Date

2019

Journal article

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Author(s)

Hiblot, Gaspard

;

Arimura, Hiroaki

;

Witters, Liesbeth

;

;

;

;

Horiguchi, Naoto

;

Collaert, Nadine

;

Van der Plas, Geert

Journal

IEEE Transactions on Device and Materials Reliability

Metrics

2042 since deposited on 2021-10-27

1last month

Acq. date: 2026-01-09