Impact of reactor- and transistor-type on electron shading

Thumbnail
View/open
Metadata
Show full item record
Authors
Creusen, Martin; Ackaert, J.; De Backer, E.; Groeseneken, Guido
Conference
Proceedings 1999 International Symposium on Plasma Process-Induced Damage - P2ID
Title
Impact of reactor- and transistor-type on electron shading
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections