Authors

Creusen, Martin; Van den bosch, G.; van der Groen, Sonja; Groeseneken, Guido; Ackaert, J.; De Backer, E.

Conference

ESSDERC'99 - Proceedings of the 29th European Solid-State Device Research Conference; 13-15 September 1999; Leuven, Belgium.

Title

Impact of plasma density and pattern aspect ratio on plasma damage in deep submicron CMOS technologies

Publication type

Proceedings paper