Authors

Kljucar, Luka; Mitard, Jerome; Rassoul, Nouredine; Dekkers, Harold; Steudel, Soeren; del Agua Borniquel, Jose Ignacio; De Wachter, Bart; Teugels, Lieve; Tsvetanova, Diana; Devriendt, Katia; Grisin, Ilja; Boccardi, Guillaume; Hody, Hubert; Nag, Manoj; Di Piazza, Luca; Wilson, Chris; Kar, Gouri Sankar; Tokei, Zsolt; Ramalingam, J.; Cao, Yong; Diehl, Daniel L.

Conference

Extended Abstracts of the 2019 International Conference on Solid State Devices and Materials - SSDM

Title

IGZO integration scheme for enabling IGZO nFETs

Publication type

Proceedings paper

Embargo date

9999-12-31