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IGZO integration scheme for enabling IGZO nFETs

dc.contributor.authorKljucar, Luka
dc.contributor.authorMitard, Jerome
dc.contributor.authorRassoul, Nouredine
dc.contributor.authorDekkers, Harold
dc.contributor.authorSteudel, Soeren
dc.contributor.authordel Agua Borniquel, Jose Ignacio
dc.contributor.authorDe Wachter, Bart
dc.contributor.authorTeugels, Lieve
dc.contributor.authorTsvetanova, Diana
dc.contributor.authorDevriendt, Katia
dc.contributor.authorGrisin, Ilja
dc.contributor.authorBoccardi, Guillaume
dc.contributor.authorHody, Hubert
dc.contributor.authorNag, Manoj
dc.contributor.authorDi Piazza, Luca
dc.contributor.authorWilson, Chris
dc.contributor.authorKar, Gouri Sankar
dc.contributor.authorTokei, Zsolt
dc.contributor.authorRamalingam, J.
dc.contributor.authorCao, Yong
dc.contributor.authorDiehl, Daniel L.
dc.date.accessioned2021-10-27T11:33:39Z
dc.date.available2021-10-27T11:33:39Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33304
dc.sourceIIOimport
dc.titleIGZO integration scheme for enabling IGZO nFETs
dc.typeProceedings paper
dc.contributor.imecauthorKljucar, Luka
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorRassoul, Nouredine
dc.contributor.imecauthorDekkers, Harold
dc.contributor.imecauthordel Agua Borniquel, Jose Ignacio
dc.contributor.imecauthorDe Wachter, Bart
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorTsvetanova, Diana
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.imecauthorBoccardi, Guillaume
dc.contributor.imecauthorHody, Hubert
dc.contributor.imecauthorNag, Manoj
dc.contributor.imecauthorDi Piazza, Luca
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorKar, Gouri Sankar
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecRassoul, Nouredine::0000-0001-9489-3396
dc.contributor.orcidimecDekkers, Harold::0000-0003-4778-5709
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.contributor.orcidimecTsvetanova, Diana::0000-0002-5632-5539
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.contributor.orcidimecBoccardi, Guillaume::0000-0003-3226-4572
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage303
dc.source.endpage304
dc.source.conferenceExtended Abstracts of the 2019 International Conference on Solid State Devices and Materials - SSDM
dc.source.conferencedate2/09/2019
dc.source.conferencelocationNagoya Japan
dc.identifier.urlhttps://confit.atlas.jp/guide/event/ssdm2019/subject/G-1-02/detail?lang=en
imec.availabilityPublished - open access


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