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SAQP spacer merge and EUV self-aligned block decomposition at 28nm metal pitch on imec 7nm node

dc.contributor.authorLee, Jae Uk
dc.contributor.authorChoi, Soo Han
dc.contributor.authorYasser, Sherazi
dc.contributor.authorRyan Ryoung han, Kim
dc.date.accessioned2021-10-27T12:13:54Z
dc.date.available2021-10-27T12:13:54Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33389
dc.sourceIIOimport
dc.titleSAQP spacer merge and EUV self-aligned block decomposition at 28nm metal pitch on imec 7nm node
dc.typeMeeting abstract
dc.contributor.imecauthorLee, Jae Uk
dc.contributor.orcidimecLee, Jae Uk::0000-0002-9434-5055
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage109620N
dc.source.conferenceDesign-Process-Technology Co-optimization for Manufacturability XIII
dc.source.conferencedate24/02/2019
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttps://doi.org/10.1117/12.2515216
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 10962


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