Authors

Li, Changzheng; Cauwe, Maarten; Yang, Yang; Schaubroeck, David; Mader, Lothar; Op de Beeck, Maaike

ISSN

2079-6412

Issue

9

Journal

Coatings

Volume

9

Title

Ultra-long-term reliable ensapsulation using an atomic layer deposited HfO2/Al2O3/HfO2 triple-interlayer for biomedical implant

Publication type

Journal article

Embargo date

9999-12-31