Authors

Liebens, Maarten; Slabbekoorn, John; Miller, Andy; Beyne, Eric; Yeoh, Richard; Krah, T.; Vangal, A.; Hiebert, S.; Cross, A.

Conference

2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

Title

What's in space – Exploration and improvement of line/space defect inspection of fine-pitch redistribution layer for fan-out wafer level packaging

Publication type

Meeting abstract