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Design of slot waveguide for ultra-violet light based on atomic layer deposition

dc.contributor.authorLin, Chupao
dc.contributor.authorBaets, Roel
dc.contributor.authorRoelkens, Gunther
dc.contributor.authorLe Thomas, Nicolas
dc.date.accessioned2021-10-27T12:45:07Z
dc.date.available2021-10-27T12:45:07Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33451
dc.sourceIIOimport
dc.titleDesign of slot waveguide for ultra-violet light based on atomic layer deposition
dc.typeProceedings paper
dc.contributor.imecauthorLin, Chupao
dc.contributor.imecauthorBaets, Roel
dc.contributor.imecauthorRoelkens, Gunther
dc.contributor.imecauthorLe Thomas, Nicolas
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.contributor.orcidimecRoelkens, Gunther::0000-0002-4667-5092
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageW.Po1.5
dc.source.conference21st European Conference on Integratred Optics (ECIO 2019)
dc.source.conferencedate24/04/2019
dc.source.conferencelocationGhent Belgium
imec.availabilityPublished - open access


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