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Study of the mechanical stress impact on silicide contact resistance by 4-point bending
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Authors
Liu, Yefan
;
Yu, Hao
;
Hiblot, Gaspard
;
Kruv, Anastasiia
;
Schaekers, Marc
;
Horiguchi, Naoto
;
Velenis, Dimitrios
;
De Wolf, Ingrid
Conference
2019 IEEE International Reliability Physics Symposium (IRPS)
Title
Study of the mechanical stress impact on silicide contact resistance by 4-point bending
Publication type
Proceedings paper
Embargo date
9999-12-31
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