Epitaxial growth of (Si)GeSn source/drain layers for advanced gate all around devices

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Authors
Loo, Roger; Vohra, Anurag; Porret, Clément; Hikavyy, Andriy; Rosseel, Erik; Schaekers, Marc; Capogreco, Elena; Shimura, Yosuke; Kohen, David; Tolle, John; Vandervorst, Wilfried
Conference
2019 Compound Semiconductor Week (CSW)
Title
Epitaxial growth of (Si)GeSn source/drain layers for advanced gate all around devices
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Meeting abstract
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