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Roughness decomposition: an on-wafer methodology to discriminate mask, metrology, and shot noise contributions
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2030 since deposited on 2021-10-27
2last month
Acq. date: 2026-06-01
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Statistics
Views
2030 since deposited on 2021-10-27
2last month
Acq. date: 2026-06-01
Citations