Authors

De Gendt, Stefan; Arnauts, Sophia; Witters, Thomas; Rink, I.; Wortelboer, R.; Huber, A.; Meuris, Marc; Heyns, Marc

Conference

Electrochemical Society Fall Meeting: 6th International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

Title

Vapor phase decomposition - droplet collection: Evalutation of a wafer surface preparation system

Publication type

Meeting abstract

Embargo date

9999-12-31