Authors

De Gendt, Stefan; Huber, A.; Onsia, Bart; Arnauts, Sophia; Kenis, Karine; Knotter, D. M.; Mertens, Paul; Heyns, Marc

Conference

Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon

Title

Vapor phase decomposition - droplet collection. Can we improve the collection efficiency for copper contamination?

Publication type

Proceedings paper

Embargo date

9999-12-31