dc.contributor.author | Maslow, Mark John | |
dc.contributor.author | Yaegashi, Hidetami | |
dc.contributor.author | Frommhold, Andreas | |
dc.contributor.author | Schiffelers, Guido | |
dc.contributor.author | Wahlisch, Felix | |
dc.contributor.author | Rispens, Gijsbert | |
dc.contributor.author | Slachter, Bram | |
dc.contributor.author | Yoshida, Keisuke | |
dc.contributor.author | Hara, Arisa | |
dc.contributor.author | Oikawa, Noriaki | |
dc.contributor.author | Pathak, Abhinav | |
dc.contributor.author | Cerbu, Dorin | |
dc.contributor.author | Hendrickx, Eric | |
dc.contributor.author | Bekaert, Joost | |
dc.date.accessioned | 2021-10-27T13:42:00Z | |
dc.date.available | 2021-10-27T13:42:00Z | |
dc.date.issued | 2019 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/33556 | |
dc.source | IIOimport | |
dc.title | Impact of local variability on defect-aware process windows | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Frommhold, Andreas | |
dc.contributor.imecauthor | Schiffelers, Guido | |
dc.contributor.imecauthor | Rispens, Gijsbert | |
dc.contributor.imecauthor | Yoshida, Keisuke | |
dc.contributor.imecauthor | Oikawa, Noriaki | |
dc.contributor.imecauthor | Pathak, Abhinav | |
dc.contributor.imecauthor | Cerbu, Dorin | |
dc.contributor.imecauthor | Hendrickx, Eric | |
dc.contributor.imecauthor | Bekaert, Joost | |
dc.contributor.orcidimec | Frommhold, Andreas::0000-0001-6824-5643 | |
dc.contributor.orcidimec | Bekaert, Joost::0000-0003-3075-3479 | |
dc.contributor.orcidimec | Hendrickx, Eric::0000-0003-2516-0417 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 109570H | |
dc.source.conference | Extreme Ultraviolet (EUV) Lithography X | |
dc.source.conferencedate | 24/02/2019 | |
dc.source.conferencelocation | San Jose USA | |
dc.identifier.url | https://doi.org/10.1117/12.2514719 | |
imec.availability | Published - imec | |
imec.internalnotes | Proceedings of SPIE; Vol. 10957 | |