Authors

Moussa, Alain; Saib, Mohamed; Paolillo, Sara; Lazzarino, Frederic; Illiberi, Andrea; Maes, Jan; Deng, Shaoren; Charley, Anne-Laure; Leray, Philippe

Conference

Metrology, Inspection, and Process Control for Microlithography XXXIII

Title

Localized power spectral density analysis on atomic force microscopy images for advanced patterning applications

Publication type

Proceedings paper

Embargo date

9999-12-31